Pump and Trap
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Ebara pump
Air-cooled dry pump Pumping speed from 9 cfm to 36 cfm Highest water vapor pumping of any air-cooled dry pump Preferred choice in load lock, PVD, analytical applications (LCMS, ICPMS), Oxygen Plasma Systems |
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Vane pump
Air-cooled, Oil-sealed with speeds ranging from 5 cfm to 178 cfm Rapid pumping and ability to handle vapor Build-in anti-suckback valve to keep oil out of the system Preferred choice for laboratory and light industrial application Low maintenance |
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Screw pump
Air-cooled or water-cooled dry pump Pumping speed from 47 cfm to 1,060 cfm Shortest pumping path of any dry pump Well suited in abrasive and corrosive environment Low maintenance |
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Scroll pump
Lowest cost dry pump, oil free and clean environment Pumping speed from 2.5 cfm to 43 cfm
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Turbo pump
Highly efficient, cost-effective solution to high pumping requirement Pumping speed from 75 l/s to 2,400 l/s for nitrogen Ultimate pressure to 10-9 Torr Uses extremely rugged, mechanical bearing Mounts in any orientation
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Trap
Captures oil fog, mist or smoke from exhaust of oil flooded vacuum pumps Rugged all steel construction Compact low profile design Easy field maintenance Available in single-piece and coaxial style |